Publications (33)
Finite-Element Method Simulations of High-Q Nanocavities with 1D Photonic Bandgap
S. Burger, J. Pomplun, F. Schmidt +1
Numerical Investigation of Light Scattering off Split-Ring Resonators
S. Burger, L. Zschiedrich, R. Klose +6
Rigorous Simulation of 3D Masks
S. Burger, R. Köhle, L. Zschiedrich +4
FEM Modelling of 3D Photonic Crystals and Photonic Crystal Waveguides
S. Burger, R. Klose, A. Schaedle +2
Numerical analysis of nanostructures for enhanced light extraction from OLEDs
L. Zschiedrich, H. Greiner, S. Burger +1
Rigorous Simulations of 3D Patterns on Extreme Ultraviolet Lithography Masks
S. Burger, L. Zschiedrich, J. Pomplun +1
3D finite element simulation of optical modes in VCSELs
M. Rozova, J. Pomplun, L. Zschiedrich +2
Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
M. Hammerschmidt, M. Weiser, X. Garcia Santiago +3
Method for fast computation of angular light scattering spectra from 2D periodic arrays
J. Pomplun, S. Burger, L. Zschiedrich +2
Accurate simulation of light transmission through subwavelength apertures in metal films
D. Lockau, L. Zschiedrich, S. Burger
JCMmode: An Adaptive Finite Element Solver for the Computation of Leaky Modes
L. Zschiedrich, S. Burger, R. Klose +2
Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations
S. Burger, L. Zschiedrich, J. Pomplun +4
Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation
S. Burger, R. Köhle, L. Zschiedrich +4
Magnetic metamaterials at telecommunication and visible frequencies
C. Enkrich, M. Wegener, S. Linden +6
Finite element method for accurate 3D simulation of plasmonic waveguides
S. Burger, L. Zschiedrich, J. Pomplun +1
Finite Element Simulation of Light Propagation in Non-Periodic Mask Patterns
L. Zschiedrich, F. Schmidt
Reduced basis method for computational lithography
J. Pomplun, L. Zschiedrich, S. Burger +1
Fast simulation method for parameter reconstruction in optical metrology
S. Burger, L. Zschiedrich, J. Pomplun +2
A Rigorous Finite-Element Domain Decomposition Method for Electromagnetic Near Field Simulations
L. Zschiedrich, S. Burger, A. Schädle +1
hp-finite-elements for simulating electromagnetic fields in optical devices with rough textures
S. Burger, P. Gutsche, M. Hammerschmidt +5
Reduced basis method for source mask optimization
J. Pomplun, L. Zschiedrich, S. Burger +4
Rigorous FEM-Simulation of EUV-Masks: Influence of Shape and Material Parameters
J. Pomplun, S. Burger, F. Schmidt +4
Advanced Finite Element Method for Nano-Resonators
L. Zschiedrich, S. Burger, B. Kettner +1
3D Simulations of Electromagnetic Fields in Nanostructures using the Time-Harmonic Finite-Element Method
S. Burger, L. Zschiedrich, F. Schmidt +4
Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides
S. Burger, F. Schmidt, L. Zschiedrich
Benchmark of Rigorous Methods for Electromagnetic Field Simulations
S. Burger, L. Zschiedrich, F. Schmidt +2
Goal Oriented Adaptive Finite Element Method for the Precise Simulation of Optical Components
L. Zschiedrich, S. Burger, J. Pomplun +1
Finite-element based electromagnetic field simulations: Benchmark results for isolated structures
S. Burger, L. Zschiedrich, J. Pomplun +1
Electromagnetic Field Simulations of Isolated and Periodic 3D Photomask Patterns
S. Burger, L. Zschiedrich, F. Schmidt +3
Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures
S. Burger, B. H. Kleemann, L. Zschiedrich +1
hp-finite element method for simulating light scattering from complex 3D structures
S. Burger, L. Zschiedrich, J. Pomplun +2
Advanced finite-element methods for design and analysis of nanooptical structures: Applications
S. Burger, L. Zschiedrich, J. Pomplun +2
FEM investigation of leaky modes in hollow core photonic crystal fibers
J. Pomplun, R. Holzlöhner, S. Burger +2