Method for fast computation of angular light scattering spectra from 2D periodic arrays
arXiv:1603.04169 · doi:10.1117/12.2219666
Abstract
An efficient numerical method for computing angle-resolved light scattering off periodic arrays is presented. The method combines finite-element discretization with a Schur complement solver. A significant speed-up of the computations in comparison to standard finite-element method computations is observed.
Proceedings article, SPIE conference "Metrology, Inspection, and Process Control for Microlithography XXX"