papers
Publications (19)
physics.optics2011
Rigorous Simulations of 3D Patterns on Extreme Ultraviolet Lithography Masks
S. Burger, L. Zschiedrich, J. Pomplun +1
physics.optics2012
3D finite element simulation of optical modes in VCSELs
M. Rozova, J. Pomplun, L. Zschiedrich +2
physics.optics2016
hp-finite-elements for simulating electromagnetic fields in optical devices with rough textures
S. Burger, P. Gutsche, M. Hammerschmidt +5
physics.optics2010
Reduced basis method for source mask optimization
J. Pomplun, L. Zschiedrich, S. Burger +4
physics.optics2006
Rigorous FEM-Simulation of EUV-Masks: Influence of Shape and Material Parameters
J. Pomplun, S. Burger, F. Schmidt +4
physics.optics2016
Method for fast computation of angular light scattering spectra from 2D periodic arrays
J. Pomplun, S. Burger, L. Zschiedrich +2
physics.optics2011
Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations
S. Burger, L. Zschiedrich, J. Pomplun +4
physics.optics2014
Numerical Simulation of Grating Couplers for Mode Multiplexed Systems
B. Wohlfeil, S. Burger, C. Stamatiadis +4
physics.optics2010
Finite Element Simulation of the Optical Modes of Semiconductor Lasers
J. Pomplun, S. Burger, F. Schmidt +5
physics.optics2007
Goal Oriented Adaptive Finite Element Method for the Precise Simulation of Optical Components
L. Zschiedrich, S. Burger, J. Pomplun +1
physics.optics2010
Finite element method for accurate 3D simulation of plasmonic waveguides
S. Burger, L. Zschiedrich, J. Pomplun +1
physics.optics2013
Finite-element based electromagnetic field simulations: Benchmark results for isolated structures
S. Burger, L. Zschiedrich, J. Pomplun +1
physics.optics2015
hp-finite element method for simulating light scattering from complex 3D structures
S. Burger, L. Zschiedrich, J. Pomplun +2
physics.optics2010
Reduced basis method for computational lithography
J. Pomplun, L. Zschiedrich, S. Burger +1
physics.optics2013
Advanced finite-element methods for design and analysis of nanooptical structures: Applications
S. Burger, L. Zschiedrich, J. Pomplun +2
physics.optics2010
Metrology of EUV Masks by EUV-Scatterometry and Finite Element Analysis
J. Pomplun, S. Burger, F. Schmidt +3
physics.optics2007
FEM investigation of leaky modes in hollow core photonic crystal fibers
J. Pomplun, R. Holzlöhner, S. Burger +2
physics.optics2013
Fast simulation method for parameter reconstruction in optical metrology
S. Burger, L. Zschiedrich, J. Pomplun +2
physics.optics2011
Finite-Element Method Simulations of High-Q Nanocavities with 1D Photonic Bandgap
S. Burger, J. Pomplun, F. Schmidt +1