Nanomechanical Spectroscopy of Ultrathin Silicon Nitride Suspended Membranes

Abstract

Mechanical properties of a nanomechanical resonator have a significant impact on the performance of a resonant Nano-electromechanical system (NEMS) device. Here we study the mechanical properties of suspended membranes fabricated out of low-pressure chemical vapor deposited silicon nitride thin films. Doubly-clamped membranes of silicon nitride with thickness less than 50 nm and length varying from 5 um to 60 um were fabricated. The elastic modulus and stress in the suspended membranes were measured using Atomic Force Microscope (AFM)-based nanomechanical spectroscopy. The elastic modulus of the suspended membranes was found to be significantly higher than those of corresponding thin films on the substrate. A reduction in the net stress after the fabrication of suspended membrane was observed and is explained by estimating the contributions of thermal stress and intrinsic stress. We establish a mathematical model to calculate the normalized elastic modulus of a suspended membrane. Lastly, we study the capillary force-gradient between the SiNx suspended membrane-Si substrate that could collapse the suspended membrane.

27 pages (including supplementary information), 6 figures in the main text