Depth calibrations of a 2D-CMOS-based partially coherent light interferometer

Abstract

This work concerns the development of a 3D measuring system able to realize noncontact surface topography with millimetric depth-range and micrometric resolutions both in the spatial and depth axes. The optical concept is based on the well known low coherence interferometry (LCI) technique. The most widespread set-up of such technique is that of measuring only a point at a time with a 2D scanning system that permits the measure on an area. The novel concept of our instrument is based on the use of a 2D sensor (CMOS), where every single pixel measures a point on the object and this permits a fast analysis on square centimeters areas without the need for any precise (and expensive) scanning system. We present here accurate depth calibration which shows the potentiality of this instrument.

Pg. 376-379 ISBN: 9780955308260