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paper

Systematic efficiency study of line-doubled zone plates

arXiv:1705.02807 · doi:10.1016/j.mee.2017.01.017

Abstract

Line-doubled Fresnel zone plates provide nanoscale, high aspect ratio structures required for efficient high resolution imaging in the multi-keV x-ray range. For the fabrication of such optics a high aspect ratio HSQ resist template is produced by electron-beam lithography and then covered with Ir by atomic layer deposition (ALD).