An instrument for advanced in situ x-ray studies of metal-organic vapor phase epitaxy of III-nitrides

Abstract

We describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffracted beam access over a wide angular range, and minimal thermal sample motion, giving the sub-micron positional stability and reproducibility needed for coherent x-ray studies. The instrument enables surface x-ray photon correlation spectroscopy, microbeam diffraction, and coherent diffraction imaging of atomic-scale surface and film structure and dynamics during growth, to provide fundamental understanding of MOVPE processes.

13 pages, 13 figures, published in RSI v2 revision, clarified several points for reader from suggestions of referees, fixed typo Please cite paper as : G. Ju, et al., Review of Scientific Instruments 88, 035113 (2017)