High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions
arXiv:1609.05646
Abstract
We report on fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of ~100 micron.
7 pages, 5 figures