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Probing the magnetic moment of FePt micromagnets prepared by Focused Ion Beam milling

arXiv:1504.07104 · doi:10.1063/1.4928929

Abstract

We investigate the degradation of the magnetic moment of a 300 nm thick FePt film induced by Focused Ion Beam (FIB) milling. A $1~μ\mathrm{m} \times 8~μ\mathrm{m}$ rod is milled out of a film by a FIB process and is attached to a cantilever by electron beam induced deposition. Its magnetic moment is determined by frequency-shift cantilever magnetometry. We find that the magnetic moment of the rod is $μ= 1.1 \pm 0.1 \times 10 ^{-12} \mathrm{Am}^2$, which implies that 70% of the magnetic moment is preserved during the FIB milling process. This result has important implications for atom trapping and magnetic resonance force microscopy (MRFM), that are addressed in this paper.

4 pages, 4 figures