Adiabatic embedment of nanomechanical resonators in photonic microring cavities
arXiv:1402.5683 · doi:10.1063/1.3458692
Abstract
We report a circuit cavity optomechanical system in which a nanomechanical resonator is adiabatically embedded inside an optical ring resonator with ultralow transition loss. The nanomechanical device forms part of the top layer of a horizontal silicon slot ring resonator, which enables dispersive coupling to the dielectric substrate via a tapered nanogap. Our measurements show nearly uncompromised optical quality factors (Q) after the release of the mechanical beam.