Spectroscopy of mechanical dissipation in micro-mechanical membranes
arXiv:1108.2617 · doi:10.1063/1.3646914
Abstract
We measure the frequency dependence of the mechanical quality factor (Q) of SiN membrane oscillators and observe a resonant variation of Q by more than two orders of magnitude. The frequency of the fundamental mechanical mode is tuned reversibly by up to 40% through local heating with a laser. Several distinct resonances in Q are observed that can be explained by coupling to membrane frame modes. Away from the resonances, the background Q is independent of frequency and temperature in the measured range.
4 pages, 5 figures