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paper

Conformal oxide coating of Carbon Nanotubes

arXiv:0706.2998 · doi:10.1063/1.2841710

Abstract

The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. We report the first integration of high-dielectric oxide films onto carbon nanotube electrodes with an aim of ultra-high integration density of FeRAMs (Tb/in2).

4 pages, 3 figures